Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829049 | Small spot spectroscopic ellipsometer with refractive focusing | Jianhui Chen | 2004-12-07 |
| 6768785 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Jon Opsal | 2004-07-27 |
| 6753962 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2004-06-22 |
| 6744850 | X-ray reflectance measurement system with adjustable resolution | Jeffrey T. Fanton, Louis N. Koppel | 2004-06-01 |
| 6707056 | Stage rotation system to improve edge measurements | Jeffrey T. Fanton | 2004-03-16 |