Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797633 | In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning | Robert J. Kraft, Kenneth Newton, Daty M. Rogers | 2004-09-28 |