Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797633 | In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning | Ping Jiang, Robert J. Kraft, Daty M. Rogers | 2004-09-28 |
| 6774031 | Method of forming dual-damascene structure | Abbas Ali | 2004-08-10 |
| 6723636 | Methods for forming multiple damascene layers | Noel Russell, Changming Jin | 2004-04-20 |
| 6720247 | Pre-pattern surface modification for low-k dielectrics using A H2 plasma | Brian K. Kirkpatrick, Michael Morrison, Andrew John McKerrow, Dirk N. Anderson | 2004-04-13 |