Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727185 | Dry process for post oxide etch residue removal | Antonio Luis Pacheco Rotondaro, David B. Aldrich, Eric C. Williams | 2004-04-27 |
| 6713402 | Methods for polymer removal following etch-stop layer etch | Heungsoo Park | 2004-03-30 |