Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830990 | Method and apparatus for dicing released MEMS wafers | Aaron Parker, Daniel Parker | 2004-12-14 |
| 6822304 | Sputtered silicon for microstructures and microcavities | — | 2004-11-23 |
| 6822318 | Stress isolating die attach structure and method | Daniel Parker | 2004-11-23 |