Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733617 | Direct detection of dielectric etch system magnet driver and coil malfunctions | Mu-Tsang Lin, Tse-Lun Chang, Sen-Tay Chang | 2004-05-11 |
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Yao-Ping Yang
Overall (2004): #84,427 of 270,089Top 35%
1
Patents 2004