Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733617 | Direct detection of dielectric etch system magnet driver and coil malfunctions | Mu-Tsang Lin, Tse-Lun Chang, Yao-Ping Yang | 2004-05-11 |
SC
Sen-Tay Chang
Overall (2004): #119,193 of 270,089Top 45%
1
Patents 2004