Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821895 | Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP | Bih-Tiao Lin | 2004-11-23 |
SH
Soon-Kang Huang
Overall (2004): #113,519 of 270,089Top 45%
1
Patents 2004