Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821895 | Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP | Soon-Kang Huang | 2004-11-23 |
BL
Bih-Tiao Lin
Overall (2004): #254,661 of 270,089Top 95%
1
Patents 2004