Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799312 | Dark line CD and XY-CD improvement method of the variable shaped beam lithography in mask or wafer making | Fei-Gwo Tsai | 2004-09-28 |
SL
Shy-Jay Lin
Overall (2004): #116,276 of 270,089Top 45%
1
Patents 2004