FT

Fei-Gwo Tsai

TSMC: 1 patents #234 of 898Top 30%
Overall (2004): #225,185 of 270,089Top 85%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6799312 Dark line CD and XY-CD improvement method of the variable shaped beam lithography in mask or wafer making Shy-Jay Lin 2004-09-28