Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818533 | Epitaxial plasma enhanced chemical vapor deposition (PECVD) method providing epitaxial layer with attenuated defects | Sheng-Hsiung Chen, Shun-Long Chen, Hungtse Lin, Ming-Shing Tsai | 2004-11-16 |