Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818533 | Epitaxial plasma enhanced chemical vapor deposition (PECVD) method providing epitaxial layer with attenuated defects | Sheng-Hsiung Chen, Shun-Long Chen, Ming-Shing Tsai, Lan-Chieh Shih | 2004-11-16 |
| 6730580 | Silicon substrate wafer fabrication method employing halogen gettering material and/or plasma annealing | Sheng-Hsiung Chen, Shun-Long Chen, Naite Chen | 2004-05-04 |