Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821880 | Process of dual or single damascene utilizing separate etching and DCM apparati | Hun-Jan Tao | 2004-11-23 |
| 6809028 | Chemistry for liner removal in a dual damascene process | Chien-Chung Fu | 2004-10-26 |
| 6790770 | Method for preventing photoresist poisoning | Jen-Cheng Liu, Jyu-Horng Shieh | 2004-09-14 |