Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822728 | Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system | Gregg M. Gallatin | 2004-11-23 |
| 6800408 | Use of multiple reticles in lithographic printing tools | Christopher Mason, Luis Markoya, Harry Sewell | 2004-10-05 |
| 6686101 | Non absorbing reticle and method of making same | — | 2004-02-03 |