Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780552 | Method for controlling the quality of a lithographic structuring step | Thorsten Schedel, Jens Zimmermann | 2004-08-24 |
| 6684124 | Method for controlling a processing device for a sequential processing of semiconductor wafers | Thorsten Schedel, Karl-Heinz Schumacher, Thomas Fischer, Heiko Hommen, Ralf Otto | 2004-01-27 |