Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806008 | Method for adjusting a temperature in a resist process | Torsten Seidel | 2004-10-19 |
| 6780552 | Method for controlling the quality of a lithographic structuring step | Jens Zimmermann, Sebastian Schmidt | 2004-08-24 |
| 6684124 | Method for controlling a processing device for a sequential processing of semiconductor wafers | Karl-Heinz Schumacher, Thomas Fischer, Heiko Hommen, Ralf Otto, Sebastian Schmidt | 2004-01-27 |