Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794109 | Low abosorbing resists for 157 nm lithography | Theodore H. Fedynyshyn, Roderick R. Kunz, Michael Sworin | 2004-09-21 |
| 6770413 | Hydroxyphenyl copolymers and photoresists comprising same | Hiroshi Ito, Ashish A. Pandya | 2004-08-03 |
| 6706461 | Dyed photoresists and methods and articles of manufacture comprising same | Thomas M. Zydowsky | 2004-03-16 |