Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815145 | Resist materials for 157-nm lithography | — | 2004-11-09 |
| 6794109 | Low abosorbing resists for 157 nm lithography | Roderick R. Kunz, Michael Sworin, Roger F. Sinta | 2004-09-21 |
| 6783914 | Encapsulated inorganic resists | — | 2004-08-31 |
| 6680157 | Resist methods and materials for UV and electron-beam lithography with reduced outgassing | — | 2004-01-20 |