Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727666 | XY table for a semiconductor manufacturing apparatus | Ryuichi Kyomasu, Hiroto Urabayashi, Minoru Torihata, Toshimichi Miyahara | 2004-04-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727666 | XY table for a semiconductor manufacturing apparatus | Ryuichi Kyomasu, Hiroto Urabayashi, Minoru Torihata, Toshimichi Miyahara | 2004-04-27 |