Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6749485 | Hydrolytically stable grooved polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Lee Melbourne Cook, David Shidner, Joseph So +1 more | 2004-06-15 |
| 6736709 | Grooved polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Lee Melbourne Cook, David Shidner, Joseph So +1 more | 2004-05-18 |
| 6699299 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack +3 more | 2004-03-02 |
| 6693035 | Methods to control film removal rates for improved polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Keith G. Pierce | 2004-02-17 |