Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699299 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Craig Lack, Terence M. Thomas +3 more | 2004-03-02 |
| 6693035 | Methods to control film removal rates for improved polishing in metal CMP | Vikas Sachan, Peter A. Burke, Elizabeth A. (Kegerise) Langlois | 2004-02-17 |