TH

Thomas N. Horsky

SE Semequip: 2 patents #1 of 1Top 100%
AT Axcelis Technologies: 1 patents #18 of 57Top 35%
📍 Boxborough, MA: #1 of 32 inventorsTop 4%
🗺 Massachusetts: #359 of 6,583 inventorsTop 6%
Overall (2004): #19,287 of 270,089Top 8%
3
Patents 2004

Issued Patents 2004

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6768121 Ion source having replaceable and sputterable solid source material Tommy D. Hollingsworth 2004-07-27
6744214 Electron beam ion source with integral low-temperature vaporizer 2004-06-01
6686595 Electron impact ion source 2004-02-03