Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768121 | Ion source having replaceable and sputterable solid source material | Thomas N. Horsky | 2004-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768121 | Ion source having replaceable and sputterable solid source material | Thomas N. Horsky | 2004-07-27 |