Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808965 | Methodology for fabricating a thin film transistor, including an LDD region, from amorphous semiconductor film deposited at 530° C. or less using low pressure chemical vapor deposition | Yojiro Matsueda, Satoshi Takenaka | 2004-10-26 |
| 6765265 | System and method for manufacturing a thin film transistor | Ichio Yudasaka, Piero Migliorato | 2004-07-20 |
| 6753548 | Laser heat treatment method, laser heat treatment apparatus, and semiconductor device | Tetsuya Ogawa, Hidetada Tokioka, Yukio Sato, Mitsuo Inoue, Tomohiro Sasagawa | 2004-06-22 |
| 6746903 | Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and a method for fabricating solar cells and active matrix liquid crystal devices | — | 2004-06-08 |
| 6727123 | Method for manufacturing a thin-film transistor comprising a recombination center | Ichio Yudasaka, Piero Migliorato | 2004-04-27 |
| 6673126 | Multiple chamber fabrication equipment for thin film transistors in a display or electronic device | — | 2004-01-06 |