Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753548 | Laser heat treatment method, laser heat treatment apparatus, and semiconductor device | Tetsuya Ogawa, Hidetada Tokioka, Mitsuo Inoue, Tomohiro Sasagawa, Mitsutoshi Miyasaka | 2004-06-22 |
| 6717105 | Laser annealing optical system and laser annealing apparatus using the same | Tatsuki Okamoto, Tetsuya Ogawa, Junichi Nishimae | 2004-04-06 |