Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797334 | Method for forming gas cluster and method for forming thin film | Makoto Akizuki, Satoru Ogasawara, Atsumasa Doi, Isao Yamada, Jiro Matsuo | 2004-09-28 |
| 6797339 | Method for forming thin film with a gas cluster ion beam | Makoto Akizuki, Atsumasa Doi, Isao Yamada | 2004-09-28 |
| 6720096 | Dielectric element | Shigeharu Matsushita | 2004-04-13 |