Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797334 | Method for forming gas cluster and method for forming thin film | Makoto Akizuki, Mitsuaki Harada, Satoru Ogasawara, Isao Yamada, Jiro Matsuo | 2004-09-28 |
| 6797339 | Method for forming thin film with a gas cluster ion beam | Makoto Akizuki, Mitsuaki Harada, Isao Yamada | 2004-09-28 |