Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6826489 | Fault classification in a plasma process chamber | John Scanlan | 2004-11-30 |
| 6677246 | Endpoint detection in the etching of dielectric layers | John Scanlan | 2004-01-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6826489 | Fault classification in a plasma process chamber | John Scanlan | 2004-11-30 |
| 6677246 | Endpoint detection in the etching of dielectric layers | John Scanlan | 2004-01-13 |