Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6826489 | Fault classification in a plasma process chamber | Michael Hopkins | 2004-11-30 |
| 6781383 | Method for fault detection in a plasma process | Kevin J. O'Leary, Ciaran O'Morain | 2004-08-24 |
| 6677246 | Endpoint detection in the etching of dielectric layers | Michael Hopkins | 2004-01-13 |