Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815236 | Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device | Sun-Yong Choi, Chung-Sam Jun, Kwang Soo Kim, Koung-Su Shin, Jeong Hyun Choi +1 more | 2004-11-09 |
| 6800863 | Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same | Chung-Sam Jun, Sun-Yong Choi, Dong-Chun Lee, Doo-Guen Song, Seung-Won Chae | 2004-10-05 |