Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815236 | Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device | Tae Kyoung Kim, Sun-Yong Choi, Kwang Soo Kim, Koung-Su Shin, Jeong Hyun Choi +1 more | 2004-11-09 |
| 6803241 | Method of monitoring contact hole of integrated circuit using corona charges | Tae-Min Eom, Yu-Sin Yang | 2004-10-12 |
| 6800863 | Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same | Sun-Yong Choi, Dong-Chun Lee, Tae Kyoung Kim, Doo-Guen Song, Seung-Won Chae | 2004-10-05 |