Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783905 | Electron beam exposure method using variable backward scattering coefficient and computer-readable recording medium having thereof | — | 2004-08-31 |
| 6775815 | Exposure method for correcting line width variation in a photomask | Won-tai Ki, Ji-Hyeon Choi | 2004-08-10 |