Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835970 | Semiconductor device having self-aligned contact pads and method for manufacturing the same | Dong-Seok Nam, Yun-sook Chae | 2004-12-28 |
| 6793767 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Kyeong-Koo Chi, Seung-Pil Chung, Sang-Hun Seo | 2004-09-21 |
| 6777341 | Method of forming a self-aligned contact, and method of fabricating a semiconductor device having a self-aligned contact | Kyoung-Sub Shin, Gyung-jin Min, Tae-hyuk Ahn | 2004-08-17 |
| 6767834 | Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module | Seung-Pil Chung, Kyeong-Koo Chi, Chang-Woong Chu, Sang-Hun Seo | 2004-07-27 |
| 6723607 | Method of forming fine patterns of semiconductor device | Dong-Seok Nam | 2004-04-20 |
| 6719808 | Method of and apparatus for manufacturing a semiconductor device using a polysilicon hard mask | Tae-hyuk Ahn, Won Seok Lee, Wan Jae Park | 2004-04-13 |