Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815681 | Electron beam lithography apparatus using a patterned emitter | Dong Wook Kim, In-kyeong Yoo, Chang-wook Moon | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815681 | Electron beam lithography apparatus using a patterned emitter | Dong Wook Kim, In-kyeong Yoo, Chang-wook Moon | 2004-11-09 |