Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835919 | Inductively coupled plasma system | Yuri Tolmachev, Dong-joon Ma, Hea-young Yoon | 2004-12-28 |
| 6815681 | Electron beam lithography apparatus using a patterned emitter | Dong Wook Kim, In-kyeong Yoo, In-Sook Kim | 2004-11-09 |
| 6784438 | Electron projection lithography apparatus using secondary electrons | In-kyeong Yoo, Dong Wook Kim | 2004-08-31 |