Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709546 | Device and method for etching a substrate by using an inductively coupled plasma | Volker Becker, Franz Laermer, Andrea Schilp | 2004-03-23 |
KB
Klaus Breitschwerdt
Overall (2004): #174,523 of 270,089Top 65%
1
Patents 2004