Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812127 | Method of forming semiconductor device including silicon oxide with fluorine, embedded wiring layer, via holes, and wiring grooves | Takayuki Oshima, Hiroshi Miyazaki, Hideo Aoki | 2004-11-02 |
| 6767782 | Manufacturing method of semiconductor device | Takeshi Saikawa, Ryohei Maeno, Sadayuki Okudaira, Tetsuo Saito, Tsuyoshi Tamaru | 2004-07-27 |