Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825093 | Process window enhancement for deep trench spacer conservation | — | 2004-11-30 |
| 6673686 | Method of forming a gate electrode contact spacer for a vertical DRAM device | Klaus Hummler | 2004-01-06 |