Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740558 | SiGe vertical gate contact for gate conductor post etch treatment | — | 2004-05-25 |
| 6734059 | Semiconductor device with deep trench isolation and method of manufacturing same | — | 2004-05-11 |
| 6724030 | System and method for back-side contact for trench semiconductor device characterization | — | 2004-04-20 |
| 6673686 | Method of forming a gate electrode contact spacer for a vertical DRAM device | Arnd Scholz | 2004-01-06 |