Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821570 | Method for preparing a polymer for chemical mechanical polishing | Yaw S. Obeng | 2004-11-23 |
| 6818301 | Thermal management with filled polymeric polishing pads and applications therefor | Yaw S. Obeng | 2004-11-16 |
| 6764574 | Polishing pad composition and method of use | Yaw S. Obeng, Kathleen C. Richardson | 2004-07-20 |
| 6688956 | Substrate polishing device and method | Yaw S. Obeng | 2004-02-10 |