Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821570 | Method for preparing a polymer for chemical mechanical polishing | Edward M. Yokley | 2004-11-23 |
| 6818301 | Thermal management with filled polymeric polishing pads and applications therefor | Edward M. Yokley | 2004-11-16 |
| 6764574 | Polishing pad composition and method of use | Edward M. Yokley, Kathleen C. Richardson | 2004-07-20 |
| 6706383 | Polishing pad support that improves polishing performance and longevity | Peter A. Thomas | 2004-03-16 |
| 6688956 | Substrate polishing device and method | Edward M. Yokley | 2004-02-10 |
| 6684704 | Measuring the surface properties of polishing pads using ultrasonic reflectance | — | 2004-02-03 |