Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6679765 | Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatus | Jen-Chieh Tung, Kuan-Fu Chang, Sheng Chang | 2004-01-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6679765 | Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatus | Jen-Chieh Tung, Kuan-Fu Chang, Sheng Chang | 2004-01-20 |