Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6817924 | Chemical mechanical polishing apparatus, profile control system and conditioning method thereof | Ching-Yen Lin, Chia-Ching Hsieh, Kao-Wei Huang | 2004-11-16 |
| 6679765 | Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatus | Yu-Wei Chin, Kuan-Fu Chang, Sheng Chang | 2004-01-20 |