Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673716 | Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques | George Tkach, Michael Woitge, Michal Danek | 2004-01-06 |