ST

Sing-Pin Tay

MT Mattson Technology: 2 patents #3 of 28Top 15%
📍 Ottawa, CA: #38 of 510 inventorsTop 8%
Overall (2004): #40,936 of 270,089Top 20%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6706643 UV-enhanced oxy-nitridation of semiconductor substrates Yao Zhi Hu 2004-03-16
6707011 Rapid thermal processing system for integrated circuits Yao Zhi Hu 2004-03-16