Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706643 | UV-enhanced oxy-nitridation of semiconductor substrates | Sing-Pin Tay | 2004-03-16 |
| 6707011 | Rapid thermal processing system for integrated circuits | Sing-Pin Tay | 2004-03-16 |