Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Hitoshi Hatada, Masaki Kato, Hiroshi Shirasu, Masahiro Iguchi | 2004-11-02 |
| 6750951 | Optical apparatus, exposure apparatus, and exposure method | Masaki Kato, Hidefumi Shibano | 2004-06-15 |