Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Hitoshi Hatada, Masaki Kato, Motoo Koyama, Masahiro Iguchi | 2004-11-02 |
| 6795169 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2004-09-21 |