Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815867 | Substrate usable for an acoustic surface wave device, a method for fabricating the same substrate and an acoustic surface wave device having the same substrate | Tomohiko Shibata, Mitsuhiro Tanaka | 2004-11-09 |
| 6759715 | Epitaxial base substrate and epitaxial substrate | Tomohiko Shibata, Mitsuhiro Tanaka, Osamu Oda | 2004-07-06 |
| 6727164 | Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film | Tomohiko Shibata, Mitsuhiro Tanaka, Keiichiro Asai | 2004-04-27 |
| 6709703 | Method for fabricating a III-V nitride film and an apparatus for fabricating the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2004-03-23 |